X-Prep® Vision™ - Substrate Measurement Instrument

Mechanical Milling

The X-Prep® Vision™ is a metrology tool that enables measurement of silicon and semitransparent substrates. It is necessary for applications that require uniform thinning to a specific target with a tolerance of +/- 3 µm or better.

The X-Prep® fixture adapter is also secured to the motorized stage on the X-Prep® Vision™, ensuring the measurement/tool control coordinates remain aligned when transferred between systems. 

A library with over 130 materials (i.e., GaAs, InGaAs, SiC, Sapphire/Al2O3, InP, SiGe, GaN, photo-resist) is included with every system.

Meaurement & Observation - How it Works

IR light is focused onto a sample, and a unique signal based on the refractive index of the material is created. The return signal is analyzed by the software to produce a thickness value.

Measuring Below 10 µm Thickness

For applications requiring thinning to less than 10 µm, precise measurement is possible only by adding the visible light spectrometer accessory.

More Views


Multipoint scan or single-point thickness measurement   10 microns to full thickness (1 mm) range of measurement (15 nm to 1 mm thick)
Motorized, automatic X/Y/Z (auto-focus) with <1s acquisition time   Automatic edge and corner detection aligns measurement grid with X-Prep® - including theta correction
Edge exclusion with X/Y input   Stage fitted with X-Prep® fixture adapter
"Drive to Coordinate" software navigation   Viewing of either 2D plot/map or 3D graph
Supplied with Allied proprietary X-Correct™ software   CCD camera included
Roughness - 15 micron finish   100 mm x 100 mm X/Y range of motion
Software automation extendable through .NET   Data export using standard Windows methods
One (1) year warranty   Dimensions: 14" W x 17" D x 19" H (355 x 431 x 483 mm)
Item # Description Qty
15-50105 X-PREP® VISION™ 100 SUBSTRATE MEASUREMENT INSTRUMENT, 100-240V AC 100 mm x 100 mm X/Y stage travel